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发明名称
POLISHING HEAD
摘要
申请公布号
JPH07241766(A)
申请公布日期
1995.09.19
申请号
JP19940033749
申请日期
1994.03.03
申请人
NIKON CORP
发明人
SHINADA KUNINORI
分类号
B24B41/04;B24B47/10;B24B49/16;(IPC1-7):B24B41/04
主分类号
B24B41/04
代理机构
代理人
主权项
地址
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