| 摘要 |
A transport system comprises a carrier in the form of a belt, drum or reciprocating member (10) having a surface and arrays of first and second conductors (34, 36) extending under that surface generally parallel to one another, each second conductor being spaced close to a first conductor to define a narrow gap between them. A voltage source (42) applies a potential difference between the conductors to produce electrostatic fields at said gaps which can attract and hold a substrate to said carrier surface. Switching is provided so that a potential difference is applied only between selected ones of the first and second conductors so as to control the areas of the carrier surface to which the substrate is held. In the case of a transport with a belt-type carrier, indicia (52, 56) may be applied to the belt enabling the longitudinal and lateral positions of the belt to be monitored to achieve predictive positioning of the substrate relative to successive work stations serviced by the transport. <IMAGE> |
