发明名称 METHOD AND APPARATUS FOR SLICING WORK
摘要 PURPOSE:To raise precision in work of a thin piece to be cut out next from a work by a method wherein a section of the work after cutting is effectively corrected by grinding in slicing work wherein the thin piece is cut out by cutting the work. CONSTITUTION:A work 30 is moved in a radial direction of a revolving blade 10 relatively thereto to cut the work 30 along a target reference surface with an inner peripheral edge 11 of the blade 10, and a thin piece is cut out. In that case, an axial displacement of the blade 10 is detected with a blade displacement sensor 24, and stored in a central part displacement memory 47. After cutting, an indexing amount-calculator 54 calculates a relative indexing amount for correction by grinding a tip surface of the work 30 with the inner peripheral edge 11 of the blade in a direction of approaching the target reference surface when the work 30 is returned to an original position. A support member-driving motor controller 56 controls indexing operation with a support member-driving motor 17 based on the indexed amount.
申请公布号 JPH07237216(A) 申请公布日期 1995.09.12
申请号 JP19940031061 申请日期 1994.03.01
申请人 TOYO A TEC KK 发明人 HAMAZAKI TATSUMI;MATSUMOTO ISAO;NASU KENICHI;KAWAGUCHI KEIJI
分类号 B24B49/10;B24B9/06;B24B27/06;B28D5/02;H01L21/304;(IPC1-7):B28D5/02 主分类号 B24B49/10
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