Herstellungsverfahren für einen Messaufnehmer mit Widerstandselementen.

摘要

A first substrate (100) having a working region (110), a flexible region (120), and a fixed region (130) is prepared. Resistance elements (R) are formed within the flexible region on a first surface of this substrate. A portion of the first substrate is remove. Thus, the flexible region is allowed to have flexibility. A second substrate (200) is connected to a second surface of the first substrate. The second substrate is cut later into two portions of a working portion (210) and a pedestal (220). The working portion is connected to the working region of the first substrate, and the pedestal is connected to the fixed region of the first substrate. In order to control displacements in upward and downward directions of the working portion, control substrates (300, 400) are further connected. A force applied to the working portion by acceleration or magnetism is detected as changes in the resistance values of the resistance elements.