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发明名称
Elektronenoptisches System zur Erzeugung eines pseudoparallelen Elektronenstrahls mit kleinem Strahlquerschnitt.
摘要
申请公布号
DE69018256(T2)
申请公布日期
1995.09.07
申请号
DE19906018256T
申请日期
1990.06.01
申请人
SHIMADZU CORP., KYOTO, JP
发明人
HAYASHI, SHIGEKI, NISHIGYO-KU, KYOTO, JP
分类号
H01J37/04;H01J37/141;H01J37/28;(IPC1-7):H01J37/141
主分类号
H01J37/04
代理机构
代理人
主权项
地址
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