发明名称
摘要 A semiconductor device having an air bridge wiring structure comprising a first layer of conductors disposed on a semiconductor substrate, a plurality of bridges posts disposed on widened portions of the first layer of conductors, and bridge plates disposed straddling a plurality of bridge posts, the widened portions of the first layer of conductors being disposed at positions which are not in straight lines but are shifted with respect to each other.
申请公布号 JPH0783053(B2) 申请公布日期 1995.09.06
申请号 JP19870154104 申请日期 1987.06.19
申请人 发明人
分类号 H01L21/768;H01L23/522;(IPC1-7):H01L21/768 主分类号 H01L21/768
代理机构 代理人
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