| 摘要 |
PURPOSE:To enable transfer without exchanging arms, smoothly deliver an object to be treated to each treatment mechanism and enable effectively a series of treatments, by enabling selecting either one of a supporting means or a holding means in each treatment process, and controlling and changing the operation range of the arms. CONSTITUTION:In a processing equipment having a plurality of processing equipments which perform processing on wafers and a transferring mechanism which transfers wafers to the processing equipments, the transferring mechanism is provided with a retaining means 61 which retains the peripheral part of a wafer at a plurality of parts, and an arm 59 having a holding means which has at lest one suction part 61 which is made to abut against the lower surface in the vicinity of the periphery of the wafer and holds the wafer. |
