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发明名称
PLASMA GENERATION DEVICE
摘要
申请公布号
JPH07235395(A)
申请公布日期
1995.09.05
申请号
JP19940023992
申请日期
1994.02.22
申请人
TOKYO ELECTRON LTD
发明人
ISHII NOBUO
分类号
H05H1/46;C23C16/50;C23F4/00;H01L21/205;H01L21/302;H01L21/3065;H01L21/31;H01Q7/00;(IPC1-7):H05H1/46;H01L21/306
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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