| 摘要 |
PURPOSE:To control the rate or gas flow with accuracy for stabilized detecting sensitivity for angular velocities by enabling a pair of angular-velocity-detecting heating wires to be used also as a flow sensor without providing another flow sensor on a sensor main body and be used in temperature compensation. CONSTITUTION:A temperature compensating circuit 12 is connected in series with the power source of an angular-velocity-detecting bridge circuit 10, and a parallel or series circuit is formed which consists of the temperature compensating circuit 12 in particular, a heat-sensitive resistance element 121 provided inside a gas passage, and a reference resistance element 122 that is provided outside the gas passage.
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