Method of controlling a gap of a hydrostatic bearing apparatus

摘要

A hydrostatic bearing apparatus comprises a base member having a static pressure guide surface to which a static pressure pocket is formed, a temperature detector for detecting a temperature of an operation oil in the static pressure pocket at an outlet portion thereof and generating a signal representing the detected outlet temperature of the operation oil, a temperature controller for controlling a temperature of the operation oil to be supplied in the static pressure pocket in response to the signal from the temperature detector, and a pressure controller for controlling a pressure in the static pressure pocket by controlling a flow rate of the operation oil supplied to the static pressure pocket. An operation oil source storing the operation oil to be supplied to the static pressure pocket is further disposed. A gap between the static pressure guide surface and a member to be supported of the hydrostatic bearing apparatus is maintained always constant in accordance with the control of the operation oil temperature and the operation oil pressure.