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发明名称
SEMICONDUCTOR DEVICE FOR STRESS EVALUATION
摘要
申请公布号
JPH07235578(A)
申请公布日期
1995.09.05
申请号
JP19940027929
申请日期
1994.02.25
申请人
MATSUSHITA ELECTRON CORP
发明人
MATSUSHIMA HIROSHI
分类号
H01L21/44;H01L21/28;H01L21/66;H01L23/08;(IPC1-7):H01L21/66
主分类号
H01L21/44
代理机构
代理人
主权项
地址
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