| 摘要 |
A pneumatic and magnetic bearing type motor provides a hollow rotary member fitted rotatably on a stationary shaft, radial pneumatic bearings having dynamic pressure generating grooves formed on one of the stationary shaft and hollow rotary member, supporting the hollow rotary member in a radial direction with the aid of dynamic pressures generated, and a thrust magnetic bearing supporting the hollow rotary member in a thrust direction thereof. In the motor, the position where the hollow rotary member is supported by the thrust magnetic bearing is substantially coincident with the equilibrium point where moments of the pressures are equal, whereby the motor is substantially free from vibration during operation, and the bearings are substantially prevented from being damaged when the motor is started or stopped.
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