| 摘要 |
The method comprises (A) setting a target by fixing at least one lens to be coated in a vacuum chamber, (B) cleaning the surface of the target lens with ion-jet of inert gas(Ar, etc.), to remove attached impurities and smoothe the rough surface, and (C) ionizing a sample of coating material to be coated on the surface of the target lens. The method can prevent porosity production and impurity inclusion in the coated layer as the coating process is conducted under inert gas atmosphere but not under vacuum.
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