Optical measurement sensor with vernier scale read=out from IC

摘要

The optical measurement sensor contains an integrated circuit (1) with light sensitive surfaces (11) which are geometrically arranged so as to produce four sinusoidal surfaces at phase angles of 0 deg., 90 deg., 180 deg. and 270 deg. The correlated pattern (A), for example a ruler (5) projects a grating with the same period as the sinusoids of the integrated circuit (1). By projecting the form on the IC (1), the signals from the surfaces (1A) are correlated to generate a signal sequence with the accuracy of the IC dimensions, allowing interpolation with the light sensitive surfaces.