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发明名称
Verfahren zur CVD von Kupfer.
摘要
申请公布号
DE69111587(D1)
申请公布日期
1995.08.31
申请号
DE19916011587
申请日期
1991.12.20
申请人
AIR PRODUCTS AND CHEMICALS, INC., ALLENTOWN, PA., US
发明人
NORMAN, JOHN ANTHONY THOMAS, ENCINITAS, CA 92024, US;DYER, PAUL NIGEL, ALLENTOWN, PA 18103, US
分类号
C07F1/08;C07C13/263;C07C45/00;C07C49/92;C07F1/00;C23C16/06;C23C16/18;C23F1/12;H01L21/285;H01L21/3213;H01L21/768;(IPC1-7):C23C16/18
主分类号
C07F1/08
代理机构
代理人
主权项
地址
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