| 发明名称 |
Process for forming diamond coatings. |
| 摘要 |
A diamond coating is produced on a substrate by using a base gas to produce a plasma. The base gas contains hydrogen, a hydrocarbon and possibly an inert gas. The hydrocarbon gas contains a triple bond and is esp. acetylene. The process takes place at 0.05-500 mbar and 300-1000 degrees C. |
| 申请公布号 |
EP0669408(A1) |
申请公布日期 |
1995.08.30 |
| 申请号 |
EP19950101843 |
申请日期 |
1995.02.10 |
| 申请人 |
LINDE AKTIENGESELLSCHAFT |
发明人 |
WERNER, STEFAN, DIPL.-ING.;VOLZ, BERNHARD, DIPL.-ING.;TISCHLER, FRIEDRICH |
| 分类号 |
C23C16/27 |
主分类号 |
C23C16/27 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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