发明名称 ANODE FORMING METHOD FOR PLASMA DISPLAY PANEL
摘要 PURPOSE:To provide an anode forming method for PDP eliminating surface roughness further with uniformity of film thickness for a sandblasting method. CONSTITUTION:On a substrate 10, a strip-shaped anode 12 and a stripe-shaped auxiliary anode 13 are formed parallelly to each other by an alkaliproof material. A sandblast proofing layer (aluminum layer) 14 is formed in an upper surface of this anode. Successively on the substrate, after a dielectric layer 16 is formed so as to bury the auxiliary anode and a two-layer structure comprising the anode and the aluminum layer, a partition forming sandblastproofing pattern 18 is formed on the dielectric layer. By using a sandblasting method, the dielectric layer is polished to an upper surface part of the substrate in an anode side and to an upper surface of the auxiliary anode, and then the structure is immersed in an alkaline separating solution, to partly remove the sandblastproofing pattern and the aluminum layer.
申请公布号 JPH07230756(A) 申请公布日期 1995.08.29
申请号 JP19940021077 申请日期 1994.02.18
申请人 OKI ELECTRIC IND CO LTD 发明人 KOTANI KYOKO;TERAO YOSHITAKA;FUJII KOZO;YAMAGATA TOSHIKAZU
分类号 H01J9/02;H01J17/49 主分类号 H01J9/02
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