发明名称 POSITION-SENSING/GUIDING APPARATUS
摘要 <p>PURPOSE:To provide a position-sensing/guiding apparatus whereby the alignment/mapping operations of the processed objects stored in a cassette can be simplified. CONSTITUTION:In the present apparatus, such a storage housing 9 as a cassette wherein such a predetermined number of plate-like processed objects as LCD boards are arranged in a laminar way at a predetermined equal space, guiding means 14, 14' which are provided near the outer periphery of the storage housing 9 and guide the processed objects while being engaged with the outer peripheries/peripheral edges of the processed objects stored in the storage housing 9, and position sensisng means for sensing the positions of the processed objects which are provided in the guiding means 14, 14' are provided respectively. The guiding means 14, 14' are so configured respectively that they can approach separably the storage housing 9 nearly in parallel with the laminar surfaces of the processed objects, and the position sensing means comprise the sensors provided respectively in the positions opposed to the respective processed objects whose number is equal to the integer-multiplied number of the processed objects. Thereby, both the alignments and mappings of the processed objects can be performed concurrently, and as a result, their throughputs can be improved.</p>
申请公布号 JPH07231031(A) 申请公布日期 1995.08.29
申请号 JP19940040375 申请日期 1994.02.15
申请人 TOKYO ELECTRON LTD;TERU ENG KK 发明人 HIROKI TSUTOMU;SATOYOSHI TSUTOMU
分类号 B65G1/00;H01L21/304;H01L21/3065;H01L21/31;H01L21/67;H01L21/673;H01L21/68;(IPC1-7):H01L21/68 主分类号 B65G1/00
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