| 摘要 |
PURPOSE:To provide a method of manufacturing a color filter substrate which has high precision colored patterns with a high throughput at a low cost in the method of manufacturing the color filter substrate for a liquid crystal display device. CONSTITUTION:Colored resins 3 to 5 having plural colors are formed on a transparent substrate 1 by repeatedly executing, at plural times successively from the region of the large exposure to the region of the small exposure at the time of the stepwise exposure, a process in which a positive type photosensitive resin film 2 in the region of the largest stepwise exposure is removed by executing development after the positive type photosensitive resin film 2 is formed on the transparent substrate 1 and the positive type photosensitive resin film 2 is stepwisely exposed by selectively changing the exposure for each color region, and a process in which a negative type photosensitive colored resin film 3 is formed, exposed and developed from the back surface of the transparent substrate 1, and the colored resin film 3 is made to remain on the transparent substrate 1 in the region in which the positive type photosensitive resin film 2 is removed. |
