| 摘要 |
PURPOSE:To surely enable mass production of a substrate of good dimensional accuracy, etc., by reducing temperature dependency during temporary burning by properly changing density of high melting point metallic paste before temporary burning so that burning contraction coefficient of a high melting point metal and sintering contraction coefficient of ceramics in a temporary burning temperature region almost coincide with each other. CONSTITUTION:A green sheet 1 is manufactured by forming a sheet of slurry containing aluminum nitride powder as a main element. A plurality of through hole formation holes 2 are formed in a specified position of the green sheet 1. Then, tungsten paste P as high melting point paste is printed in the green sheet 1, a through hole inner conductor circuit 3a is formed inside the through hole formation hole 2 of the green sheet 1 and a wiring pattern 3b is formed in a surface of the green sheet 1. A plurality of green sheets 1 are laminated and a green sheet lamination body 4 is acquired by thermocompression. Then, the lamination body 4 is temporarily burned, set at a hot press device 6 and burned. |
