PRESSURE REGULATING APPARATUS OF VACUUM SYSTEM,申请号KR19920013010U-传众专利搜索

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发明名称	PRESSURE REGULATING APPARATUS OF VACUUM SYSTEM
摘要
申请公布号	KR950006638(Y1)	申请公布日期	1995.08.16
申请号	KR19920013010U	申请日期	1992.07.14
申请人	LG SEMICONDUCTOR CO., LTD.	发明人	JON, BYONG - SOP
分类号	H01L21/30;(IPC1-7):H01L21/30	主分类号	H01L21/30
代理机构		代理人
主权项
地址

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