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发明名称
METHOD FOR PROVIDING A PROPORTIONED VAPOUR FLOW AND ALSO APPARATUS FOR CARRYING IT OUT.
摘要
申请公布号
EP0468996(B1)
申请公布日期
1995.08.16
申请号
EP19900905701
申请日期
1990.04.03
申请人
ASM INTERNATIONAL N.V.
发明人
GRANNEMAN, ERNST, HENDRIK, AUGUST;KWAKMAN, LAURENS, FRANS, TAEMSZN;PIEKAAR, HANS, WILLEM;SLUIJK, BOUDEWIJN, GIJSBERT
分类号
C23C16/20;C23C16/44;C23C16/448;H01L21/205;H01L21/28;H01L21/285;(IPC1-7):C23C16/44
主分类号
C23C16/20
代理机构
代理人
主权项
地址
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