REAL TIME VACUUM DEPOSITION MONITOR DEVICE,申请号JP19940012870-传众专利搜索

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发明名称	REAL TIME VACUUM DEPOSITION MONITOR DEVICE
摘要
申请公布号	JPH07216544(A)	申请公布日期	1995.08.15
申请号	JP19940012870	申请日期	1994.02.04
申请人	NKK CORP	发明人	HAYASHI KOUYUU;MAEKAWA TOSHIYA
分类号	C23C14/50;(IPC1-7):C23C14/50	主分类号	C23C14/50
代理机构		代理人
主权项
地址

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