发明名称 SHORT WAVELENGTH OPTICAL SYSTEM
摘要 PURPOSE:To prolong the service life of an optical system by setting the width of incident light in a predetermined direction narrower than the effective width of a selected optical element in the predetermined direction and gradually shifting the region on the selected optical element, being irradiated with the incident light, in the predetermined direction. CONSTITUTION:In an optical system 4 receiving an incident light having wavelength of 450nm or less and delivering a light through one or a plurality of optical elements 5A, 5B, the width of a incident light to at least one selected optical element 5A is set narrower, in a predetermined direction, than the effective width of the selected optical element 5A in the predetermined direction. When a plurality of optical elements 5A, 5B are selected, they are classified into a plurality of optical element groups which are then provided individually with rotary means 7A, 7B for rotating the optical elements in each group synchronously.
申请公布号 JPH07211623(A) 申请公布日期 1995.08.11
申请号 JP19940007447 申请日期 1994.01.27
申请人 NIKON CORP 发明人 TSUCHIYA ATSUSHI
分类号 G02B27/18;G03F7/20;H01L21/027;(IPC1-7):H01L21/027 主分类号 G02B27/18
代理机构 代理人
主权项
地址