Plasma workpiece processing

摘要

The process for plasma working of a workpiece, in a vacuum vessel, initially ignites the plasma and then the LC resonance circuit (15) is set so that, with a constant HF voltage at the HF electrode (2), the electrical power given in the plasma is at max.. Also claimed is an appts. with a monitor (8) to measure the power delivered between the generator (6) and the HF electrode (2). A monitor (7) measures the voltage at the HF electrode (2), between the electrode (2) and earth.