| 摘要 |
A method for enhancing aluminum nitride includes, in one version, annealing sputtered aluminum nitride in a reducing atmosphere (11), and subsequently annealing the sputtered aluminum nitride in an inert atmosphere (12). A superior aluminum nitride thin film (13) results. The films can withstand exposure to boiling water for times up to twenty minutes and maintain a refractive index, Nf, greater than 2.0, and a preferred crystalline orientation ratio, I(002)/I(102), in excess of 1000. <IMAGE> |
