发明名称 HARDENING METHOD OF WATER-SOLUBLE PHOTORESIST FILM
摘要 PURPOSE:To obtain a resist film having excellent resolution, acid resistance, adhesion to a metal thin plate and mechanical strength without using chromium salt which is harmful for a human body by using aldehydes and metal salt for a hardening liquid. CONSTITUTION:After a photoresist film essentially comprising casein formed on a metal thin plate is exposed and developed, the metal plate is dipped in a hardening liquid and subjected to burning treatment to harden the water-soluble photoresist film. The hardening liquid used contains at least aldehydes and metal salt. Besides, the hardening liquid contains acid to have pH>=3 and contains two or more kinds of metal salts. The aldehydes and metal salts are not specified, but glutaraldehyde and Ca ion are preferable.
申请公布号 JPH07207464(A) 申请公布日期 1995.08.08
申请号 JP19940018959 申请日期 1994.01.17
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 SAWADA HIROSHIGE;HAMADA TAKESHI;FUKUCHI TAKESHI
分类号 G03F7/40;C23F1/00;H01J9/14;H01L21/027;(IPC1-7):C23F1/00 主分类号 G03F7/40
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