SUBSTRATE PROCESSING APPARATUS

摘要

PURPOSE:To improve throughput while keeping constant a transfer interval for each substrate processing section by adequately setting the transfer time to the next substrate processing section from a desired substrate processing section. CONSTITUTION:A driving time of each driving mechanism corresponding to different directions required to move a movable body 20 to the stop position of the next substrate processing section from the stop position of the desired substrate processing section is stored. On the occasion of transferring the substrate to the next substrate processing section from the specified substrate processing section depending on the transfer sequence, the maximum required driving time among the predetermined driving times is calculated depending on the transfer as the required transfer time of the movable body 20 during the substrate transfer. Moreover, the substrate is transferred so that each transfer time of the substrate to the next substrate processing section from the predetermined substrate processing section specified by the transfer sequence becomes equal to a sum of the required transfer time calculated by the calculating means and the time required by the transfer with the arms 21, 22.