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发明名称
WAFER PROBER
摘要
申请公布号
JPH07201936(A)
申请公布日期
1995.08.04
申请号
JP19930350396
申请日期
1993.12.28
申请人
NEC CORP
发明人
MIYAGI YUJI
分类号
G01R31/26;G01R1/073;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01R31/26
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