Electrodeless microwave-generated radiation apparatus.

摘要

An electrodeless microwave-generated radiation apparatus comprising a microwave cavity wall made of metal material defining a microwave cavity (2), a lamp (1) arranged in the microwave cavity (2) containing therein emission material, a microwave generator supplying microwaves for exciting the emission material in the lamp (1), a microwave-coupling means coupling microwaves to the lamp through a waveguide (6), and a dielectric mirror (11) arranged behind the lamp (1). The rise time can be remarkably shortened so that the damage of a magnetron can be reduced. The intensity of emission along the lamp is controlled by a projection or parasitic element (18). Further, by the use of dielectric mirror (11), the object can be processed without rising a temperature of the object too high.