MATERIAL FOR OPTICAL DEVICE, OPTICAL DEVICE AND PRODUCTION OF OPTICAL DEVICE

摘要

PURPOSE:To provide a method for providing an optical device capable of easily realizing an extensive lens action. CONSTITUTION:A photoresist layer 12 is formed on a lens face forming layer 10 formed on a transparent substrate 1 directly or through a light-shielding layer, and a lens pattern or a lens array pattern is formed on the photoresist layer by photolithography. The patterned photoresist layer 12 is heat-treated to convex the photoresist surface by the hot flow and surface tension of the photoresist 12. The convexed photoresist 12 and the lens face forming layer 10 are then dry-etched to engrave the convexed surface of the photoresist 12 on the lens face forming layer 10, and a lens face or a lens face array is obtained in the lens face forming layer 10.