发明名称 Process for producing a superconductor
摘要 A superconductor, e.g. a cryotron, is formed by vapour depositing a metal film of e.g. tin on a substrate of e.g. glass, removing parts of the film, forming an insulating film over some of the remaining metal, cleaning the exposed metal by a glow discharge in argon, nitrogen, hydrogen or steam, and then vapour depositing a further layer of metal e.g. lead without breaking the vacuum. Parts of both metal films may be removed by a photo-resist-etch process. Alternatively tin may be deposited on lead.
申请公布号 GB1073069(A) 申请公布日期 1967.06.21
申请号 GB19650030694 申请日期 1965.07.19
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人
分类号 C23C14/02;G03F7/40;G11C11/44;H01B3/30;H01L39/00;H01L39/24;H01L49/02;H05K3/00 主分类号 C23C14/02
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