摘要 |
A superconductor, e.g. a cryotron, is formed by vapour depositing a metal film of e.g. tin on a substrate of e.g. glass, removing parts of the film, forming an insulating film over some of the remaining metal, cleaning the exposed metal by a glow discharge in argon, nitrogen, hydrogen or steam, and then vapour depositing a further layer of metal e.g. lead without breaking the vacuum. Parts of both metal films may be removed by a photo-resist-etch process. Alternatively tin may be deposited on lead.
|