发明名称 WIRE BONDING DEVICE
摘要 PURPOSE:To shorten bonding work time for improved productivity by balancing the moment around a supporting point with the dead weight of a movable part for lighter weight and higher speed. CONSTITUTION:A holder 11 face to rotate vertically around a supporting point 8, a supersonic horn 10 mounted on the holder 11, a capillary 4 mounted on the supersonic horn 10, a clamper 9 built in the holder 11 above the capillary 4, a bracket 12 holding the holder 11 free to rotate around the supporting point 8, and a linear motor 13 driving the holder mounted on the bracket 12, are provided. Then, each element is so assigned that the moment around the supporting point 8 balances only with its dead weight.
申请公布号 JPH07193104(A) 申请公布日期 1995.07.28
申请号 JP19930331605 申请日期 1993.12.27
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 IMANISHI MAKOTO;KABESHITA AKIRA;YONEZAWA TAKAHIRO;SHIDA SATOSHI
分类号 H01L21/60;H01L21/607 主分类号 H01L21/60
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