ELECTRON MICROSCOPE WITH RAMAN SPECTROSCOPY

摘要

Electron microscope provided, in the direction of the longitudinal axis, with at least one electron beam generation system, a condenser and objective lens system, a specimen chamber with a specimen mount, a projection lens system with imaging screen for the purpose of transmission electron microscopy (TEM) and/or an electron detector for the purpose of scanning electron microscopy (SEM). The microscope is used in combination with an externally positioned Raman spectrometer and an associated light source for injecting and extracting, via a window in the microscope wall, a light beam to be directed at the specimen, and specimen-related Raman radiation, respectively. In the specimen chamber, a light beam and Raman radiation guide system is provided with an optical guide to guide the light beam to - and the Raman radiation from - the specimen. The guide system and the specimen mount are displaceable with respect to one another for mutual alignment of the specimen and the optical axis of the Raman spectrometer. The guide system may comprise en objective and lens system positioned at the end of the optical guide. The guide system may be in a fixed position in the specimen chamber next to the longitudinal axis of the microscope, a specimen displacement mechanism displacing the specimen mount from a position in the longitudinal axis of the microscope to a position aligned with the optical axis in the said guide system and vice versa. Equally, the optical guide may be displaceable to a position in which the optical axis running out from the end of the guide coincides with the longitudinal axis of the microscope.