PLASMA DEVICE AND PLASMA PROCESSING USING SAME,申请号JP19930328356-传众专利搜索

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发明名称	PLASMA DEVICE AND PLASMA PROCESSING USING SAME
摘要
申请公布号	JPH07183276(A)	申请公布日期	1995.07.21
申请号	JP19930328356	申请日期	1993.12.24
申请人	SONY CORP	发明人	TATSUMI TETSUYA
分类号	C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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