| 发明名称 |
Method of using corrosion prohibiters in aluminum alloy films |
| 摘要 |
A method of metalization of semiconductor devices wherein predominantly aluminum metal films incorporate a minor amount of magnesium in admixture with the aluminum, or in layered juxtaposition with the aluminum layer, to provide resistance to corrosion, particularly acidic corrosion.
|
| 申请公布号 |
US5434104(A) |
申请公布日期 |
1995.07.18 |
| 申请号 |
US19940204829 |
申请日期 |
1994.03.02 |
| 申请人 |
VLSI TECHNOLOGY, INC. |
发明人 |
CAIN, JOHN L.;VINES, LANDON B.;KOENIGSEDER, SIGMUND;LEE, CHANG-OU;FUJISHIRO, FELIX |
| 分类号 |
H01L21/285;H01L21/3205;(IPC1-7):H01L21/44 |
主分类号 |
H01L21/285 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
