| 摘要 |
PURPOSE:To constitute a compact and accurate acceleration sensor by increasing the effective area in the fixed part and movable part of an acceleration sensor. CONSTITUTION:The sensor is formed by a first sensor part 22 with each fixed part 24, a movable part 26, and a guard 32 and a second sensor part 22' which is located at an upper side and is in a same shape. The fixed part 24 and 24' and support parts 27 and 27' are joined by a conductive adhesive and guards 32 and 32' are joined by an adhesive, thus displacing beams 28 and 28' for mass parts 29 and 29' and securing an effective area which is two times larger than that of an electrode which becomes the detection part in the sensor. |
