| 摘要 |
PURPOSE:To obtain an apparatus for working only on the surface of a workpiece with an ultraviolet light by providing means for generating a linear ultraviolet light, and a moving table moving substantially perpendicularly to a longitudinal direction of the light. CONSTITUTION:A board 60 to be irradiated is placed on a moving table 61 moving in one direction. Waters 51, 51' are supplied to outside of a rodlike ultra-high pressure mercury lamp 54 which generates a short wavelength light having 300-450nm while cooling. In this case, the light having a wavelength of 500nm or more to be emitted from the lamp 54 is cut off by a filter 59. Then, this light is condensed by a cylindrical lens 55 to a linear ultraviolet light 57. This light 57 is emitted to a surface to be irradiated of the board 60. The board 60 is moved at a predetermined speed on the table 61 to be sequentially scanned with the light 57. Thus, only a surface of the workpiece is heated without raising a temperature of the entire workpiece, and only an extremely thin region near its surface is crystallized. |
