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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH07176548(A)
申请公布日期
1995.07.14
申请号
JP19930344836
申请日期
1993.12.20
申请人
SHIN ETSU CHEM CO LTD
发明人
TOMIYOSHI KAZUTOSHI;DOBASHI KAZUO;INO SHIGEKI;SHIOBARA TOSHIO
分类号
C08L63/00;C08K3/00;H01L21/52;(IPC1-7):H01L21/52
主分类号
C08L63/00
代理机构
代理人
主权项
地址
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