| 摘要 |
PURPOSE:To make it possible to perform an exact location detection as for structural parts such as the outlines of electronic parts and the terminals locating on the side of an internal part thereof, etc. CONSTITUTION:Both of second light ray 12a which is emitted from a first light source 11 for transmitted light, is emitted from first light ray 11a transmitting the surrounding of an object W to be processed and a second light source 12 for reflection light and reflecting at the object W to be processed is simultaneously inputted in an image pickup means 2, an image recognition of the outline of the object W to be processed is performed by noticing first light ray 11a and the image recognition of the structural parts on the internal side of the object W to be processed by noticing second light ray 12a. |
