AIR FLOW CHECKER AND CLEAN ROOM,申请号JP19930319672-传众专利搜索

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发明名称	AIR FLOW CHECKER AND CLEAN ROOM
摘要
申请公布号	JPH07174777(A)	申请公布日期	1995.07.14
申请号	JP19930319672	申请日期	1993.12.20
申请人	MITSUBISHI ELECTRIC CORP	发明人	SASAKI MASAKO
分类号	G01P13/00;F24F7/06;H01L21/02;(IPC1-7):G01P13/00	主分类号	G01P13/00
代理机构		代理人
主权项
地址

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