发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURE.
摘要 A semiconductor device having an excellent migration resistance, a long life, and a shorter delay in its inner wiring, and a method for manufacturing such a device. Copper wire the width of which is smaller than 1 mu m and the grain size of which is more than ten times the wiring width is partly used. <IMAGE>
申请公布号 EP0626722(A4) 申请公布日期 1995.07.12
申请号 EP19930903332 申请日期 1993.02.09
申请人 OHMI TADAHIRO 发明人 OHMI TADAHIRO
分类号 H01L21/3205;H01L21/768;H01L23/52;H01L23/532 主分类号 H01L21/3205
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