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发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH07173628(A)
申请公布日期
1995.07.11
申请号
JP19930322467
申请日期
1993.12.21
申请人
HITACHI LTD
发明人
SETOYAMA HIDETSUGU;KAMEI MITSUHIRO
分类号
C23C14/35;(IPC1-7):C23C14/35
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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