| 摘要 |
PURPOSE:To provide a device of low dust generating property which restrains generation of fine particles, restrains sticking of the fine particles onto the surface of a work, and restrains dispersion of the fine particles for the circumference. CONSTITUTION:In a device of low dust generating property for processing a work 13 under clean environment, a member 12 slidably contacted with the work 13 is constituted of a base material of hard material, and a film consisting of diamond-like carbon formed on the surface of the base material. |
