发明名称 |
Verfahren zur Herstellung von miniaturisierten Chemo- und Biosensorelementen mit ionenselektiver Membran sowie von Trägern für diese Elemente |
摘要 |
PCT No. PCT/EP92/00990 Sec. 371 Date Jan. 7, 1993 Sec. 102(e) Date Jan. 7, 1993 PCT Filed May 6, 1992 PCT Pub. No. WO92/21020 PCT Pub. Date Nov. 26, 1992.The invention relates to a process for producing miniaturized chemical and biological sensor elements with ion-selective membranes. To simplify production in the micro range, an aperture (5,6) starting from the front (3) and tapering toward the back (4) is made in a thin silicon substrate (1) so that the front and back are interconnected. A liquid with which the ion-selective membrane is formed is poured into the containment (2) thus formed. Vertical ISFETs may also be made on the above principle. |
申请公布号 |
DE4115414(C2) |
申请公布日期 |
1995.07.06 |
申请号 |
DE19914115414 |
申请日期 |
1991.05.10 |
申请人 |
KNOLL, MEINHARD, PROF. DR., 48565 STEINFURT, DE |
发明人 |
KNOLL, MEINHARD, PROF. DR., 48565 STEINFURT, DE |
分类号 |
A61B5/145;A61B5/1473;A61B5/1486;G01N27/26;G01N27/327;G01N27/333;G01N27/403;G01N27/414;(IPC1-7):G01N27/414;G01N27/30 |
主分类号 |
A61B5/145 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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