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发明名称
Verfahren zum Reinigen von gasförmigen Hydriden.
摘要
申请公布号
DE69016662(T2)
申请公布日期
1995.07.06
申请号
DE19906016662T
申请日期
1990.11.15
申请人
JAPAN PIONICS CO. LTD., TOKIO/TOKYO, JP
发明人
KOICHI, KITAHARA, FUJISAWA-SHI, KANAGAWA, JP;TAKASHI, SHIMADA, CHIGASAKI-SHI, KANAGAWA, JP;KEIICHI, IWATA, NAKAKANBARA-GUN, NIIGATA, JP
分类号
C01B6/34;C01B17/16;C01B19/04;C01B25/06;C01B33/04;(IPC1-7):C01B6/34
主分类号
C01B6/34
代理机构
代理人
主权项
地址
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