发明名称 Fabrication of thin film materials.
摘要 <p>The invention described forms improved ferroelectric (or pyroelectric) layer by adding lead to an original perovskite layer having an original ferroelectric (or pyroelectric) critical grain size, then forming a layer of the lead enhanced perovskite layer having an average grain size less than the original ferroelectric (or pyroelectric) critical grain size whereby the remanent polarization (or pyroelectric figure of merit) of the layer is substantially greater than the remanent polarization (or pyroelectric figure of merit) of the original perovskite layer with an average grain size similar to the average grain size of the layer. The critical ferroelectric (or pyroelectric) grain size, as used herein, means the largest grain size such that the remanent polarization (or pyroelectric figure of merit) starts to rapidly decrease with decreasing grain sizes. Preferably, n-type lead enhanced perovskite layer is doped with one or more acceptor dopants whereby the resistivity is substantially increased. Preferably, p-type lead enhanced perovskite layer is doped with one or more donor dopants whereby the resistivity is substantially increased. Preferably, the original perovskite layer has a chemical composition ABO3, where A is one or more monovalent, divalent or trivalent elements, and B is one or more pentavalent, tetravalent, trivalent or divalent elements. Structures containing an improved ferroelectric (or pyroelectric) layer include a layer of lead enhanced perovskite layer with average grain size less than the original ferroelectric (or pyroelectric) critical grain size formed on the surface of a substrate. Other structures include such a layer of lead enhanced layer interposed between two electrically conducting layers. &lt;IMAGE&gt;</p>
申请公布号 EP0661244(A2) 申请公布日期 1995.07.05
申请号 EP19940114943 申请日期 1994.09.22
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 SUMMERFELT, SCOTT R.;BERATAN, HOWARD R.;KULWICKI, BERNARD
分类号 C04B35/49;C01G25/02;C04B35/465;C04B35/622;H01L21/8247;H01L27/10;H01L29/788;H01L29/792;H01L37/02;H01L41/24;(IPC1-7):C04B35/49 主分类号 C04B35/49
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