REMOVAL OF GRANULAR CONTAMINATION BY MEANS OF MAGNETIC FIELD SPIKING,申请号JP19940267401-传众专利搜索

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发明名称	REMOVAL OF GRANULAR CONTAMINATION BY MEANS OF MAGNETIC FIELD SPIKING
摘要
申请公布号	JPH07169752(A)	申请公布日期	1995.07.04
申请号	JP19940267401	申请日期	1994.10.31
申请人	APPLIED MATERIALS INC	发明人	ANANDO GIYUPUTA
分类号	H01L21/302;B08B7/00;C23C16/44;H01J37/32;H01L21/205;H01L21/3065;(IPC1-7):H01L21/306	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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