RADICAL SOURCE DEVICE,申请号JP19930342919-传众专利搜索

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发明名称	RADICAL SOURCE DEVICE
摘要
申请公布号	JPH07169594(A)	申请公布日期	1995.07.04
申请号	JP19930342919	申请日期	1993.12.14
申请人	NISSIN ELECTRIC CO LTD	发明人	MIYAKE KOJI;MIKAMI TAKASHI;TAWARA HIDEAKI
分类号	H05H3/02;C23C14/32;C23C16/50;C23C16/511;H01L21/302;H01L21/3065;(IPC1-7):H05H3/02;H01L21/306	主分类号	H05H3/02
代理机构		代理人
主权项
地址

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