PELLICLE FOR LITHOGRAPHY

摘要

PURPOSE:To firmly adhere a pellicle film to a pellicle frame without wrinkling or distorting the film by making the glass transition temp. of the adhesive lower than that of the film. CONSTITUTION:A pellicle film is adhered to a pellicle frame with an adhesive consisting of polymer. An amorphous fluorinated polymer is preferably used as the material for the pellicle film. An amorphous fluorinated polymer identical with or similar to that of the pellicle film is preferably used as the adhesive. The glass transition temp. of the adhesive is made lower than that of the pellicle film at least by >=5 deg.C or preferably by >=20 deg.C. As a result, even if the adhering temp. is made higher than the glass transition temp. of the adhesive to increase the adhesive strength, the temp. of the pellicle film is never increased above the glass transition temp.